Research

Plasma Source Design for Advanced Manufacturing

Recent Publications:

  • Xiao Y., Brandon J., Morsell J., Nam S.K., Bae K., Lee J-Y, Shannon S., 2023 “Effect of focus ring with external circuit on plasma uniformity of a capacitvely coupled plasma” Journal of Vacuum Science and Technology A 41, 033008; DOI: 10.1116/6.0002496
  • Xiao, Y., Du, Y., Smith, C., Nam, S.K., Lee, H., Lee, J.Y. and Shannon, S., 2021. Focus ring geometry influence on wafer edge voltage distribution for plasma processes. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 39(4), p.043006. https://doi.org/10.1116/6.0000981
  • Smith, C.L., Nam, S.K., Bae, K., Lee, J.Y. and Shannon, S., 2021. Modulating power delivery in a pulsed ICP discharge via the incorporation of negative feedback mechanisms. Journal of Applied Physics, 130(16), p.163304. https://doi.org/10.1063/5.0060240
  • Chenhui Qu, Steven J. Lanham, Steven C. Shannon, Sang Ki Nam, and Mark J. Kushner, (2020) “Power Matching to Pulsed Inductively Coupled Plasmas.” Journal of Applied Physics 127, 133302 [https://doi.org/10.1063/5.0002522]
  •  T. List, T. Ma, P. Arora, V. Donnelly, S. Shannon. (2019) “Complex transients in power modulated inductively coupled chlorine plasmas”, Plasma Sources Science and Technology, 28 025005 [https://doi.org/10.1088/1361-6595/ab000c]

Plasma Diagnostics for Advanced Characterization

Recent Publications (Last 5 Years)

  • Morsell, J., Dechant, C., Gall, G., Trosan, D., Lietz, A.M., Stapelmann, K. and Shannon, S., 2024. Estimation of mean electron energy in helium surface ionization waves on dielectric substrates. Journal of Physics D: Applied Physics, 57(39), p.395202.
  • Morsell, J., Trosan, D., Stapelmann, K. and Shannon, S., 2023. Plasma surface ionization wave interactions with single channels. Plasma Sources Science and Technology, 32(9), p.095017.
  • Morsell J.K., Bhatt N., DeChant C., Shannon S. 2023. Effect of dielectric target properties on plasma surface ionization wave propagation. Journal of Physics D: Applied Physics 56 145201 DOI 10.1088/1361-6463/acbfc9
  •  D. Peterson, Y. Xiao, K. Ford, P. Kraus, S. Shannon “Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma” Plasma Sources Science and Technology 30 065018 https://doi.org/10.1088/1361-6595/ac02b2
  • Peterson, David, Kristopher Ford, Joel Brandon, Travis Koh, Thai Cheng Chua, Kallol Bera, Wei Tian, Shahid Rauf, Philip Kraus, and Steven Shannon, (2020) “Radiofrequency phase resolved electron density measurements with the hairpin resonator probe.” Journal of Physics D: Applied Physics. 53 145203 [https://doi.org/10.1088/1361-6463/ab6944]
  • D.J. Coumou, S.T. Smith, D.J. Peterson, S. Shannon, (2019) “Time-resolved electron density measurement of E-H modes for inductively coupled plasma instabilities”, IEEE Transactions on Plasma Science, 47(5) 2102-2109 [https://doi.org/10.1109/TPS.2019.2909476]
  •  K. Ford, D.J. Peterson, J. Brandon, S.K. Nam, D. Walker, S.C. Shannon (2019). “Measurement of localized plasma perturbation with hairpin resonator probes”, Physics of Plasmas, 26, 013510 [https://doi.org/10.1063/1.5065509]
  • A. Zafar, E. Martin, S. Shannon, (2019).  “Doppler-free, Stark broadened profiles at low plasma densities in helium”, Journal of Quantitative Spectroscopy and Radiative Transfer, 230, 48-55 [https://doi.org/10.1016/j.jqsrt.2019.03.020]
  • Zafar, Abdullah, Elijah Martin, and Steve Shannon (2018). “High resolution magnetic field measurements in hydrogen and helium plasmas using active laser spectroscopy.” Review of Scientific Instruments 89(10) 10D126. [https://doi.org/10.1063/1.5039334]

Open Source Plasma Simulation

Recent Publications (Last 5 Years)

  • DeChant, C., Icenhour, C., Keniley, S., Gall, G., Lindsay, A., Curreli, D. and Shannon, S., 2023. Verification and validation of the open-source plasma fluid code: Zapdos. Computer Physics Communications, 291, p.108837.
  • DeChant C., Icenhour C., Keniley S., Lindsay A., Gall G., Hizon K.C., Curreli D., Shannon S. “Verification methods for drift-diffusion reaction models for plasma simulations” Plasma Sources Science and Technology 32(4) 044006 DOI 10.1088/1361-6595/acce65
  • Du Y., Kruger F., Nam S.K., Lee H., Yoo S., Eapen J., Kushner M.J., Shannon S. 2022 “Comparison of glancing angle scattering on different materials in a high aspect ratio plasma etching process using molecular dynamic simulation” Journal of Vacuum Science and Technology A 40 053007 DOI 10.1116/6.0002008

Plasma Applications

Recent Publications (Last 5 Years)

  • Bhatt, N., Brier‐Jones, J., Trosan, D., Brinkley, C., Pecoraro, J., Smallwood, J., Crofton, A., Hudson, S., Kirsch, W., Stapelmann, K. and Shannon, S., 2021. Depyrogenation using plasmas: A novel approach for endotoxin deactivation using a dielectric barrier discharge at atmospheric pressure. Plasma Processes and Polymers, 18(11), p.2100089. https://doi.org/10.1002/ppap.202100089

Magnetohydrodynamics

Recent Publications (Last 5 Years)

  • Shutayfi, M., Raj, A., Eapen, J. and Shannon, S., 2023. Design, modeling, and analysis of a compact-external electromagnetic pumping system for Pool-type liquid metal-cooled fast reactors. Annals of Nuclear Energy, 193, p.109997.